分子/增压泵的结构、性能及其应用

Construction,performance and applications of molecular/booster pump

分子／增压泵是一种最近实现产品化的新一代真空泵，该泵兼有中、高真空泵的性能，能耗低，能获得清洁真空，还能承受大气冲击，应用前景十分广泛。本文详细介绍了分子／增压泵的结构、性能和应用，并与常用的中、高真空泵作比较。最后，介绍了分子／增压泵的一种独特应用——“大型真空设备的冲洗抽气法”，该方法将抽气时间缩短至50％，能耗降至10％～25％。

Molecular/booster pump （MBP） is a new generation of vacuum pumps, which has advantages of both TMP and root＇s pump and, especially, it is available to bear atmospheric impact. So, it has prospects for wide applications. The construction, performance and applications of MBP are described, and comparisons are made between MBP and other high/medium vacuum pumps. A special application of MBP named ＂flushing/pumping technique for large vacuum chamber＂ is discussed, by which the pumping time can be shortened bv 50 % with energy eonsurnt）tion reduced to 10%-25%.