氮化锆薄膜色度特性与工艺参数研究

Colority and technological parameters in preparation of ZrN thin films

制备了Z rN薄膜,通过采用二次正交旋转组合试验设计方案,建立了薄膜颜色和氮气浓度、靶功率与镀膜时间的数学模型,给出了各参数对薄膜颜色的影响趋势。经模型寻优,求出了在不同目标色度坐标下的最优参数组合方案。

ZrN thin films were prepared and regressive models were developed on the basis of experiment through rotational quadratic orthogonal design for the colority and three parameters, ie. , nitrogen concentration, target power and the time required for film deposition. The effects of the three parameters on the film colority were discussed. An optimum combination scheme was therefore found involving technological parameters in the coordinate planes of different colorlty objectives by way of finding optimum solution of the models.