摘要
规则小孔的流导可以通过计算得到,但对于非规则小孔,若要准确得到小孔流导的大小,就必须通过实验测量得到。文章论述了定容法测量小孔流导的方法,进行了测量不确定度的评定,得到了整个校准范围内小孔流导随进气压力变化的拟合曲线和方程,小孔流导的测量不确定度为1.1%。
Conductance of regular orifice can be known by calculation, but it is impossible for irregular orifice of which the conductance must be measured. How to measure the orifice conductance through constant volume process was discussed with the measurement uncertainty evaluated. Thus, a fitting curve and equation of orifice conductance which varies with inlet pressures were obtained within the full range of calibration. The measurement uncertainty of orifice conductance is estimated 1.1%.
出处
《真空》
CAS
北大核心
2006年第1期62-66,共5页
Vacuum
关键词
定容法
小孔流导测量
不确定度分析
constant volume process
orifice conductance measurement
uncertainty analysis
