评价衍射光栅实际分辨率的新方法

A New Method for Evaluating the Practical Resolution of Diffraction Gratings

本文叙述了平面衍射光栅分辨率及其半宽度测量法。用仪器函数理论对分辨率测试仪的缝宽作了详细讨论,并提出了改变缝宽来确定光栅实际分辨极限的新方法。给出了两块光栅用三种方法测试的结果,即谱线轮廓图波前干涉图和摄谱仪拍摄铁谱图。用三种图对照分析了这两块光栅的质量。

In this paper resolving power of diffraction gratings and its measuring methods in width at half height of central peak are described. Slit widths of instrument for measuring resolution of diffraction gratings in detail are discussed on theory of instrument profile. A new method for determining the practical resolution of diffraction gratings with change slit widths is suggested. Resolts from measuring two plane diffraction gratings with three methods, i.e. spectrum profile, wave-front interferegram, spectra of iron obtained on spe-ctrogragh are given. Quality of two diffraction gratings are analysed with comparing three kinds of diagram.