应用于流动控制的MEMS传感器和执行器

MEMS Sensor and Actuator for Flow Control

出现于20世纪80年代后期的微机械技术可以制作出微米尺度的传感器和执行器。这些微器件与信号调节和处理电路集成后,组成了可执行分布式实时控制的微电子机械系统(MEMS)。这种性能为流动控制研究开辟了一个崭新的研究领域。利用MEMS技术设计和制作了一种传感器和一种执行器。实验证明,采用体硅腐蚀的工艺制作微流体器件是可行的,同时可以避免牺牲层腐蚀和释放的复杂工艺。

The micromachining technology that emerged in the late 1980s is able to provide micron-sized sensors and actuators. These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems （MEMS） that can perform real-time distributed control. This capability opens up new territory for flow control research. Based on microelectromechanical systems（MEMS） technology, a shear stress sensor and a flow actuator is fabricated. The results show that uses this method to manufacture the micro-fluid devices is feasible. Moreover the etching and the releasing of sacrifical layer is effectively avoided.