微型溅射离子泵性能测试

Experimental Evaluation of Miniature Sputtering Ion Pump

本文介绍了小抽速微型溅射离子泵的性能测试系统和参考机械行业标准确定的测试方法,探讨了测量结果误差来源。实验测试了微型溅射离子泵的各项性能指标,为进一步研制提供了依据。

The testing technique and system of the newly developed,miniaturized sputtering ion pump with low pumping speed has been developed in accordance with the standards formulated by machine industry.Possible sources of measurement error were analyzed,and the technical specifications of the pump were experimentally evaluated.