半导体生产线建模及其仿真若干关键技术研究——基于Simul8建模仿真软件

Studies of Key Issues in Simulation and Modeling of Semiconductor Production Line--Based on Simul8 Software

为满足半导体生产线建模与仿真在仿真性能、仿真真实性等方面的较高要求,基于Simul8复杂系统仿真软件对半导体硅片制造生产线进行建模和仿真的过程中,提出了非动态加工区和动态加工区的分类的思想,探讨了各自基于Simul8的实现方法,同时分析并有效解决了工序加工时间和运输时间的统计计算问题。仿真应用表明,提出的方法在增强半导体生产线仿真真实性的同时,也有效改进了仿真的性能。

In order to meet the performance and reality request for simulation and modeling of semiconductor production line,a strategy to distinguish static inter-relationship process region and dynamic inter-relationship process region is proposed.And their realization based on Simul8 are further explored respectively.Meanwhile,the problem of step processing time and translation time is also analyzed and solved sueeessfully.Simulation result shows that both of the performance and reality of simulation can be improved.