磁悬浮转子微陀螺电容结构设计

Design of capacitance structure of micro gyroscope with electromagnetically levitated rotor

为了实现磁悬浮转子微陀螺的电容检测,使用数值积分方法计算了新型磁悬浮转子微陀螺的电容值与转子倾斜角度的关系。计算确定了电容极板尺寸,电容的连接采用了差动电容的连接方式。通过电容检测电路,检测到了小角度输入范围内的陀螺输出信号。检测结果表明:该电容结构对于静态角度输入具有较好的线性响应,该微陀螺原形的电容结构能够检测到的转子倾斜角度可达到0.1°,对应的电容变化约为1 000 aF,满足了微陀螺对电容检测的要求。

The relationship between input angle and output differential capacitance is presented for the realization of the capacitance signal detection of micro electromagnetic disk levitating gyroscope. The size and the shape of the capacitance electrode is given. By the implementation of the capacitance detection circuit, the output signal of the gyroscope is shown. Test results show that this gyroscope output result has a fairly good linearity which is accord with the capacitance computation. The minimum angle which can be detected by photo type gyroscope is not less than 0. 1 °, and the correspondent capacitance value is about 1 000 aF and can meet a demand for capacitance detection.