硅压阻式压力传感器非线性误差校正方法

Nonlinear errors correcting method of piezoresistive pressure transducer

利用ZMD31020传感器信号处理器,实现了硅压阻式传感器的非线性及温度补偿。通过软件输入预先设定的数字量给ZMD31020处理器的存贮空间,可实现硅压阻式压力传感器(PRT)的零点输出、热零点漂移、满量程输出、热灵敏度漂移和非线性的高精度校准和补偿。传感器的输出精度达到了0.275%。

The ZMD31020 is a special sensor signal processor optimized for piezoresistive sensor nonlinearity and temperature compensation. The preestablished digital quantities are inputted to ZMD31020 locations by software. The zero point output, thermal zero shift, fnll-scale output, thermal sensitivity shift and nonlinearity of piezoresistive pressure transducer （PRT） are compensated and calibrated precisely. The sensor output error is achieved to 0.275 % by error analysis.