摘要
本文简述ＢＡＬＺＥＲＳ公司生产的涡轮分子泵电源的工作原理和工作过程，绘出了重要工作点的波形并给出了工作参数，根据作者的实践对电源的维修和改进提出了方案供探讨。
The principle and the main parameters of the power of the turbmolecular pump made by BALAERS Company are briefly described.The maintenance procedure has been discussed according to the practice of the author.
出处
《质谱学报》
EI
CAS
CSCD
1996年第2期78-80,共3页
Journal of Chinese Mass Spectrometry Society
关键词
涡轮分子泵
电源
维修
质谱仪
turbomlecular pump
maintenance
procedure
