微装配中微靶球的三维移动

3 -D Motion of Microsphere Target in Micro-assambly

设计了一种用于惯性聚变的微靶球三维移动装置。采用CCD显微镜检测实现闭环装配以保证精度;由电控平移台作为粗动环节,压电陶瓷作为微动环节而形成的两级微动机构可以实现最小分辨力为0.1μm的微位移;直线+旋转执行器的旋转/线性移动实现了微靶球的三维移动;专用真空吸取器的设计解决了微靶球的取放问题。

In this paper, a 3 - D motion system of Microsphere Target used in ICF is proposed. CCD cameras are adopted to ensure the measure precision; the electric stage is used for the coarse adjustment, and the piezoelectric ceramic actuator is used for the micro adjustment. The resolving power of 0.1 micron can be achieved ; Rotary/Linear Actuator realizes that the micro - sphere target can be moved in three - dimensional space ; the micro - sphere target can be taken or put by the special vacuum pick - up gauge.