双光束直线度干涉测量装置

Laser double-beam straightness interference measuring apparatus

本文介绍在直线度测量研究中采用的一种双光束干涉装置,该装置较好地解决了激光束漂移对测量的影响,在实验室内,若忽略大气扰动的影响,精度可达0.2μm。

This paper introduces a double-bezm interference apparatus used in the study of straightness measuring. The apparatus considerably minimizes the effect of laser-beam drift on the measurement, with precision up to 0.2μm in case that the interferonce of atmospheric disturbance is left out of pccount in a laboratory. This article consists of the operation principles, the characteristics of micrometer ampliling mechanism, and aceuracy analysis of the apparatus.