摘要
通过将已知工艺参数与工艺模拟软件Tsuprem4结合起来,将模拟结果直接导入器件模拟软件M ed ic i,对击穿电压及阈值电压,终端保护环进行了模拟计算,获得了具体的设计参数,并对利用这两个软件进行虚拟制造的过程中需要注意的问题进行了阐述.
By combining techinal parameters with techinal simulation software Tsuprem4, we put simulation result into medici, which at last obtain the calculation of breakdown voltage, threshold voltage and teminatin guard ring. And the problems of doing virtual fabrication by the two programs are discussed.
出处
《辽宁大学学报(自然科学版)》
CAS
2006年第1期42-45,共4页
Journal of Liaoning University:Natural Sciences Edition
关键词
虚拟制造
工艺参数
终端保护环
virtual fabrication
technical parameters
termination guard ring.