物理气相沉积（PVD）硬质薄膜及在工模具上的应用

The Process of Hard Thin Films on Tools and Dies Deposited by Physical Vapor Deposition Technology

材料的磨损、腐蚀及其它环境损伤是机械工业面临的基本问题之一，近年来，由离子参与和等离子体增强的各种气相沉积技术为解决这一问题提供了有效的途径。物理气相沉积（PVD）是制备硬质薄膜的主要方法之一，许多技术已实现工业化生产。本文综述了物理气相沉积技术制备的各种机械功能薄膜的性能及在工模具上的应用情况。

In recent years, various plasma enhanced vapor deposition technologies have become efficient methods to increase the wear resistance, corrosion resistance and other mechanical properties of materials. Physical vapor deposition technology is a main method to deposit hard thin films and has been applied to industrial production. In this paper, we sunmmarize the properties of different mechanical hard thin films deposited by the physical vapor deposition technology and their application on tools and dies.