三维VLSI互连电容提取的边界元法

Boundary Element Method of Three Dimensional Parasitic Capacitance Extraction of Interconnects

对互连寄生电容提取的研究背景进行了简要的介绍。重点介绍了直接边界元和间接边界元方法的原理,比较了各种方法的优缺点,对和边界元法相关的各种加速算法、预条件处理及建库方法也作了简要介绍。

In this paper, the background of parasitic capacitance extraction of interconnects are briefly introduced. The principles of direct and indirect BEM are especially introduced. Main methods are compared. The accelerated algorithms, preconditioners and the building of a library corresponding to the BEM are also briefly introduced.