两腔压电泵结构与特性

The Strucrure and Performance of Double-chamber Piezoelectric Pumps

介绍了两个压电振子所构成的两腔串联和两腔并联压电泵的结构及工作原理,分析了两个压电振子驱动方式(同步工作和交叉工作)对两种结构压电泵输出性能的影响规律。制作了两腔串联和两腔并联压电泵的试验样机,分别测试了两个腔体同步工作和交叉工作状态下压电泵的输出能力,并与理论分析的结果进行了对比。理论和试验两方面的研究结果表明,在相同驱动电压和频率条件下,两个腔体交叉工作时压电泵的输出能力较好,其中并联泵的流量最大,为单个腔体流量的2倍;而串联泵的流量串联泵压力最大,是单个腔体输出压力的2倍,同时其流量也有大幅度提高,约为单个腔体流量的1.4倍。

The structure and working principle of the pumps consisted of two PZT actuators were introduced, and the output performance of the pumps with different structure and driving strategy was analyzed. Two piezoelectric pumps, serial-connected and parallel-connected, were fabricated. The double-chamber pumps were tested with both actuators being actuated in anti-phase, and then in-phase respectively. Heoretic analysis and testing results show that both serial and parallel double-chamber pumps achieve greater performance with the actuators working in anti-phase. The parallel-connected pump obtained the maximal flow-rate, which is about two times of that of a single chamber micropump. For the serial connection pump, its backup pressure is the greatest, which is about two times of that of single-chamber micropump, and its flow-rate is about 1, 4 times of that of a single-chamber micropump.