AFM压电微悬臂振动影响测量图像的研究

Research on Vibration of Atomic Force Microscope Piezoelectric Microcantilever Affecting Measuring Image

在轻敲工作模式下,原子力显微镜(AFM)压电微悬臂以较大的振幅振动。以纳米管针尖为例建立了压电微悬臂振动的数学模型并描述了纳米管尖端的振动轨迹,从纳米管尖端的振动轨迹和仿真图形的关系,指出压电微悬臂振动影响测量精度的有关参数及减小由振动产生膨胀变形的方法。根据数学图形学膨胀理论仿真出纳米管尖端振动轨迹对标准线宽模型的影响,AFM测量线宽的试验验证了上述结果。

Working at tapping mode, atomic force microscope （AFM） piezoelectric microcantilever vibrates with large amplitude. Taking example for nanotube tip, a mathematical model of piezoelectric microcantilever vibration is established and the vibration track of the nanotube tip top is described. From the relation between the nanotube tip top vibration track and the simulation figure, the relative parameters of affecting measurement precision and the method of minishing vibration-induced dilation distortions are found. According to dilation theory of mathematical morphology, the imaging procedure is simulated. The linewidth measurement tests verify the above results.