摘要
对超结理论的产生背景及其发展过程进行了介绍。以应用超结理论的COOLMOSTM器件为例,介绍了超结器件的工作原理、存在的缺点以及提出的改进方法;并对其他基于超结理论的器件进行了简单介绍。
The generation of superjunction theory and its development are introduced. With COOLMOS^TM device as an example, the operational principle of superjunetion devices based on superjunetion theory is discussed, along with its shortcomings and techniques for improvement. Finally, other applications of the superjunction theory are described in brief.
出处
《微电子学》
CAS
CSCD
北大核心
2006年第1期75-79,83,共6页
Microelectronics
