摘要
介绍了基于MEMS技术的磁悬浮转子微陀螺的旋转原理,进行了针对旋转力矩的仿真;在此基础上,给出了相应实现方案的指标分析和系统设计。经过实际测试,旋转驱动后,微陀螺可以得到均匀快速的旋转效果,为下一步陀螺效应的研究打下了基础。
The principle of rotation of rnicrornachined gyroscope with magnetically levitated rotator is described, and a simulation is made on the rotating torque, A driver circuit for rotation of the mieromachined gyroscope is designed based on the simulation. Experimentation shows that the micromachined gyroscope can rotate fast and equa bly by rotation driving, which provides a foundation for further research of the gyroscope effect.
出处
《微电子学》
CAS
CSCD
北大核心
2006年第1期111-113,117,共4页
Microelectronics
基金
国家高技术研究发展(863)计划资助项目(2002AA745120)
国家自然科学基金资助项目(60402003)
上海市科委重大专项基金
教育部科学技术项目重大项目资助(0307)
关键词
磁悬浮转子
微陀螺
文氏桥
移相
正交驱动
Magnetically levitated rotator
Micromachined gyroscope
Wein Bridge
Phase shift
Quadratured drive