摘要
介绍了基于差动光栅结构的激光莫尔精密定位原理,分析了该光栅结构在实际工程应用中的莫尔信号变化特点。从双光栅计量的基本数学模型出发,详细讨论了5种影响定位精度的因素,给出了相应的数值计算结果,并根据这一结果提出了在工程应用中提高定位精度的措施。
A precision positioning principle based on differential grating structure using laser moir＇s technique is proposed. The changing characteristic of moir＇s signals in real applications is analyzed. From the basic mathematical model of double - grating measurement, five factors that could affect precision position are examined in detail. The corresponding numerical results are thus presented. Methods are further developed to improve the accuracy of alignment in engineering practice for each case.
出处
《计量学报》
CSCD
北大核心
2006年第1期7-11,共5页
Acta Metrologica Sinica
关键词
计量学
精密定位
差动光栅
莫尔信号
Metrology
Precision positioning
Differential grating
Moir＇s signal
