永磁微波离子源

A microwave ion source with permanent magnet

介绍了2.45 GHz袖珍永磁微波离子源的进展,源的外廓尺寸Φ100 min×100mm,重量小于5 kg。它可工作于脉冲和连续两种放电模式。在微波功率500 W、引出电压45 kV及等离子体电极发射孔径为5 mm的条件下,对于脉冲模式,峰值流强为100 mA,柬流密度500 mA／cm2;而对于连续模式,流强为60 mA,束流密度300 mA／cm2。两种模式的质子比均可达到80％,归一化均方根发射度小于0．1πmm·mrad。

The progress of a 2.45 GHz compact microwave ion source with permanent magnet was introduced in this paper. The source outline dimension is Ф0100mm×100mm, and its weight is less than 5 kg. It can operate in both pulse and CW mode. At 500 W microwave power, 45 kV extraction voltage and 5 mm of diameter of emittance hole on the plasma electrode, 100 mA peak current of hydrogen ion beam was extracted in pulse mode, corresponding to a beam density of 500 mA/cm^2; at the same conditions 60 mA hydrogen ion current was extracted and beam density was 300 mA/cm^2 in CW mode. The proton ratios were about 80% and emittances Erms were less than 0. 1πmm·mrad in both modes.