基于MEMS技术的红外成像焦平面阵列

A MEMS Based Focus Plane Array for Infrared Imaging

选用Au和LPCVD的低应力Si Nx薄膜材料,采用MEMS技术研制了新型间隔镀金热隔离结构的薄膜镂空式非制冷红外成像焦平面阵列,并应用光学读出的方法成功地在室温(27.47℃)背景下获得了人体的热像.实验证明间隔镀金热隔离结构的引入有效抑制了热传导对变形梁温升的限制,从而大大降低了系统的噪声等效温度差(NETD),NETD达到约200mK.

Based on the opto-mechanical effect and MEMS technology,a novel substrate-free FPA with a thermally isolated structure for uncooled infrared imaging is developed, Alternately evaporating Au on a SiN, cantilever is used for thermal isolation, A human＇s thermal image is obtained successfully using the infrared imaging system composed of the FPA and optical detection system. Experimental results show that the realization of thermal isolation in the substrate-free FPA increases the temperature of the deflecting leg effectively,while the NETD is about 200mK.