摘要
尖晶石状LiMn2O4是制备高能量密度的锂离子电池的一种很有发展前景的阴极材料。评论了近年来制备薄膜阴极的方法,包括化学酸基溶解法、溶胶-凝胶法、激光焙烧法、增强型等离子体化学气相淀积法、脉冲激光法、电子束喷射沉积法和射频磁控溅射法。着重分析了能够和IC、MEMS工艺良好集成的射频磁控溅射的方法,提出了工艺路线,并规划了下一步工作。
Spinel LiMn2O4 is a kind of promising cathode material to fabricate lithium ion thin film batteries with high power density, lightness. Through analysis we review methods fabricating thin film cathode, including chemical acetate base solution technique, sol-gel method, laser ablation, plasma enhanced chemical vapor deposition, pulsed laser deposition, radio frequency magnetron sputtering deposition, and electrostatic spray deposition. We specially analyze radio frequency magnetron sputtering deposition which is a kind of method compatible with IC and MEMS techniques, also present the process flow of our experiment, and prospect the next possible development.
出处
《军民两用技术与产品》
2006年第1期38-40,42,共4页
Dual Use Technologies & Products
