20瓦横向流动X光预电离XeCl准分子激光器

20W transverse flow x-ray preionized XeCl excimer laser

自从1975年稀有气体卤化物准分子激光器出现以来，这类激光器已被誉为新一代紫外光源。近几年来，在高能激光武器、激光核聚变、激光同位素分离、激光化学、激光半导体材料表面处理、微电子加工和激光医学等方面都获得了很大的进展。在这些应用中，所需要的激光平均功率也日益提高，

The characteriseics of a repetition rated x--ray preionized Xe-Cl excimet laser were given in this paper, The gas yelocity at laser discharge region is 20 m/see with gas recirculating ioop,The maximun laser Dutput power is 20 W at 25 pps by using low inductance capachor benk as the power sapply.