金刚石声表面波器件的研制

Analysis and preparation of SAW devices on diamond

对ZnO/IDT/金刚石多层结构高频声表面波滤波器进行模拟设计、样件制备和测量.利用热丝化学气相沉积方法,在抛光S i基底沉积致密、光滑的CVD金刚石膜;采用磁控溅射法在金刚石薄膜上制备C轴取向的氧化锌压电薄膜.研制的ZnO/IDT/金刚石/硅结构SAW滤波器,叉指换能器(IDT)指宽1.7μm,SAW滤波器频率达到1.4 GHz.

This paper presents the frequency response simulation, preparation and measurement of surface acoustic wave （SAW） filters based on ZnO/IDT/diamond multilayered structures for high frequency communication system. We deposited diamond by HR-CVD on silicon, and deposited high C-axis oriented ZnO by RF-sputtering on diamond. Based on the same IDT structure （interdigital width is 1.7μm）, the frequency response simulation results are got. The center frequency of ZnO/ diamond/Si structures can reach to 1.4 GHz.