大尺寸直径非接触光电检测系统研究

Research on an Optical Non-contact Inspecting System of Diameter in Large-scale Part

提出了一种基于激光位移测头的大尺寸直径光电测量系统,可用于直径达Φ2200mm的大尺寸工件的非接触测量。文章详细论述了测量系统结构、工作原理及同轴度测量方法,并对影响测量精度的主要误差来源进行了分析,结果表明测量精度达0.02mm。

Based on laser displacement measure head, a kind of size diameter photoelectric measure system is purposed, which can measure the big size workpiece of 2200mm without contact in diameter. It is detailed to discuss the major source of error, the measure construction of system, working principle, coaxial degree measurement technique and measure precision for affecting to go on. The results show that the measure precision reaches 0.02mm.