非接触法在微电机力矩测试中的应用

Application of Noncontact Measurement Method to the Torque Measurement of Micromotors

为解决温度、振动、摩擦力、空气流动等因素对微电机力矩测试精度影响大的问题,提出了利用非接触法对微牛·米级微电机输出力矩进行测试的测量方法。对自行研制的测试设备——微力矩测试仪的工作原理及测试精度进行了详细分析。用所提出的测试方法和设备对电磁式微电机的力矩特性进行了测量,测试结果表明:该测试方法测量精度高,能够满足微牛·米级微电机力矩特性测试的要求。

A noncontact measurement method has been proposed for measuring the pull-out torque of micromotors in order to overcome the problem of large measurement errors due to temperature, vibration, friction and the flow of air. The principle of the proposed method was explained and the measurement precisions of rotational speed and output torque of a micromotor were analyzed in detail. Through a measurement test of a mieromotor fabricated with the MEMS process, it has been verified that this method has high precision and can satisfy the requirement of micro Nm torque measurement of mieromotors.