摘要
利用单束强聚焦激光产生的光学力可以驱动微型器件,具有无机械接触和无需导线等优点,为微型机电系统提供了一种新型的驱动方式。在自行研制的飞秒激光微细加工系统中,采用一种新型的丙烯酸酯紫外光固化树脂,通过双光子聚合加工出直径6μm的万字形微转子。利用光镊装置实现了微转子的俘获,并在激光功率50mW时实现了转速为200rpm的光致旋转。微型转子的光致旋转为实现微机械马达提供了一种有效手段。
Driving micro-devices with optical force created by tight focused single laser beam provides a new driving method to MEMS field. This optical driving method is characteristic of no mechanical contact and wire connection. With a homemade femtosecond laser microfabrication system, swastika-shoped micro-rotors with the diameter of 6μm are fabricated by two-photon polymerization with the help of a novel methyl acrylate UV resin. The rotors are trapped and rotated by laser tweezers. The maximum rotation speed of over 200rpm is obtained at 50row laser power, Optical rotation of micro-rotor facilitates the implementation of micro-mechanical rotor.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2006年第1期10-13,共4页
Opto-Electronic Engineering
基金
国家自然科学基金资助项目(50275140
50335050)
关键词
微型转子
激光加工
光驱动
光致旋转
Micro-rotor
Laser processing
Optical driving
Optical rotation
