多层膜结构对硬度实验影响的数值分析

NUMERICAL ANALYSIS OF INFLUENCE OF MULTI-LAYER FILMS CONSTRUCTS ON NANOHARDNESS EXPERIMENTS

为了研究多层膜结构对纳米微硬度实验的影响,用FEPG对纳米微硬度实验中压头的压入过程进行数值模拟,分析了由TiN,Al,Ti组成的多层膜中软膜材料不同、软膜与硬膜厚度比不同以及多层膜层数不同对膜层体系产生的影响,得出梯度变化的膜层结构能够提高膜层的整体性能,为纳米微硬度实验提供了一定的参考依据．

In this paper, in order to annlysis the influence of multi-layer component on microhardness testing, the pressing process of the indenter is simulated by FEPG （Finite Element Program Generator） software. The effects on multi-layers system including of different material soft layers, different thickness proportion between soft layer and hard layer and different layer number in the multilayer are analyzed. A conclusion that multilayer construct according to gradient layer can enhance film performance is drew. It is helpful to provide the reference data for microhardness testing.