摘要
用120keVN+、Ar+、Fe+辐照聚酰亚胺薄膜,辐照剂量为5×1014—1×1017ions/cm2。对辐照样品做了表面电阻和光学吸收测量,结果表明:辐照后样品的表面电阻有明显变化,且随辐照剂量变化呈现阈值,在高剂量下达到饱和值.在不同辐照剂量和深度下用XPS和RBS方法测量了样品原子浓度和化学结构的变化,研究了辐照引起化学结构变化和表面改性间的内在联系,讨论了离子能量沉积过程.
Kapton films have been modified by ion implantation. Ions of N+, Ar+ and Fg+with energy of 120keV and doses ranging from 5 × 1014 to 1 × 1017 ions/cm2 were used to the implantation . The sheet resistivity and optical absorption of modified samples were measured. Electrical conductivity of pristine has been greatly enhanced after the ion implantation . The surface microscopic structure and compositional changes that accompanied these electrical enhancements were observed using X-ray photoemission spectroscopy (XPS) and Rutherford backscattering spectroscopy(RBS).The effect of electronic excitation energy loss on molecular degradation induced by inn irradiation was Peeved to plsy an important role.
出处
《核技术》
CAS
CSCD
北大核心
1996年第1期13-17,共5页
Nuclear Techniques
基金
甘肃省和国家自然科学基金
关键词
离子辐照
聚合物降解
能量沉积
薄膜
Ion irradiation, Polymer degradation, Energy deposition