摘要
表面起伏靶是惯性约束聚变（ＩＣＦ）分解实验中的重要实验用靶。采用激光干涉方法制备初始微扰振幅和波长分别在几和几十微米范围内的正弦调制形状，摸索了相应的工艺条件和工艺过程。用台阶仪及光学显微轮廓仪观测微加工后的形貌。探讨了调制波长的精确控制与干涉工艺之间的关系，并用电镀工艺转移图形得到用于压制的模具。
The surface perturbation target is one of the most important experimental taxgets for the resolved experiments of inertial-confinement fusiom (ICF). In the paper, the preparation of the sine modulated perturbation figures with perturbation amplitude and wavelength of about several and tens of micron respectively with the method of laser interference is reported. The perturbation profiles of the figures are investigated by an alpha-step device and an optical microscopic profiler. Different technological conditions, preparation process and their relationship with the quality of the figures are studied. Also, the mold with sine perturbation surface is obtained by electro-chemical plating.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
1996年第1期25-30,共6页
Atomic Energy Science and Technology
基金
国家高技术惯性约束聚变资助
关键词
平面靶
正弦起伏
激光干涉
核靶
惯性约束聚变
Surface perturbation targets Sine perturbation Laser interference Electroplating
