激光多层靶的研制

PREPARATION OF MULTI-LAYER LASER TARGETS

文章简述了Ｃｕ（或Ａｎ）－Ｆｏｒｍｖａｒ－Ａｌ－Ｆｏｒｍｖａｒ多层靶的制备工艺。其工艺过程是：先在载玻片上蒸镀Ｃｕ（或Ａｕ），再涂Ｆｏｒｍｖａｒ膜，脱膜装靶后再蒸镀Ａｌ。由于Ｆｏｒｍｖａｒ只受一次热蒸发，制备出了平整度满足要求的激光多层靶。

The paper describes the preparation of copper- or gold- Formvar- aluminum- Formvar multilayer laser targets. First, copper or gold is deposited on a piece of glass, then it is covered with the Formvar film. After the copper or gold layer, together with the Formvar film, is stripped off and fitted in, aluminum is deposited. Because the Formvar is vapored in the vaporing chamber only once, the obtained multi-layer target is of high quality and meets the requirements for practical use.