摘要
现代微加工技术是制备具有微米、亚微米甚至纳米结构器件的重要手段。文章介绍了现代微加工工艺中的薄膜技术、图形技术以及刻蚀技术，根据核靶技术的发展，阐明了现代微加工技术在核靶制备领域的广阔应用前景。
Advanced microfabrication technologies are important methods for the fabrication of devices with structures in micron scales. The technologies include thin film process, pattern process and etching process. According to the development of nuclear target technology, the paper gives an overview of the advanced micro fabrication technologies and indicates the possible application of the technologies in the fields of nuclear target preparation.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
1996年第1期85-89,共5页
Atomic Energy Science and Technology
基金
国家高技术惯性约束聚变领域基金
关键词
微加工
薄膜
图形技术
刻蚀
核靶制备
Microfabrication Thin film Pattern process Etching process Nuclear target
