铁电液晶空间光调制器氢化非晶硅薄膜p－i－n光敏层的研究

HYDROGENATED AMORPHOUS SILICON THIN FILM p i n PHOTOSENSOR FOR FERROELECTRIC LIQUID CRYSTAL OPTICALLY ADDRESSED SPATIAL LIGHT MODULATORS

描述了氢化非晶硅／铁电液晶空间光调制器的结构和工作原理，并从器件的电学模型出发，着重讨论了整体器件对光敏层的特性要求。

The general structure and operation of the hydrogenated amorphous silicon/ ferroelectric liquid crystal spatial light modulators(FLCSLMs) were described in detail.The electrical requirements of photosensors for FLCSLMs were discussed and derived from the a Si :H/FLC SLM electrical model and equivalent circuits.Fabrication and photoelectric characteristics of the a Si:H thin film p i n photosensors were investigated.