摘要
针对扩散硅压力传感器所存在的温度漂移和非线性等问题，分析并建立了对其实现综合补偿的方程式，并利用单片机予以实现，最终使数字压力计的精度达到0．05级。
To counter the temperature drift and non-linear of a silicon pressure resistor sensor, a formula for realizing the sonsor's compound compensation by a microcontroller is analyzed and set up. The accuracy of the digital pressure meter be mede reach 0. 05%.
出处
《测控技术》
CSCD
北大核心
1996年第2期21-24,共4页
Measurement & Control Technology
关键词
扩散硅
压力
传感器
非线性补偿
温度
压力计
silicon pressure resistor sensor, non-linear compensation, temperature compensation, digital pressure meter
