非共轴掠入射X射线显微镜参数的误差分析

Error analysis on the parameters of non-coaxial grazing Xray microscope

设计了一套由4个反射镜组成的非共轴掠入射X射线显微镜,分析了该系统的像差和成像质量。为了研制出高质量的设备,需要制定合理的加工和装配公差。研究了由于元件和结构参数(反射镜的半径,物距,掠入射角等)的误差而引起的高斯参数和像差的变化。首次用点列图和调制传递函数来定量评价图像质量降低的程度,并在此基础上制定了合理的加工和装配公差。在这些公差的约束下,研制成一套非共轴掠入射X射线显微镜,在激光引爆的惯性约束聚变的诊断实验中,用该系统获得了高质量的图像。

A set of non-coaxial grazing X-ray microscope consisting of four spherical mirrors was designed for diagnosis of ICF,and the aberrations and imaging quality of the microscope were analyzed. In order to acquire excellent image quality, It is necessary for manufacturing and assembling the microscope to set up the reasonable tolerances. In this paper, the changes of Gauss parameters and aberrations caused by component and subsystem parameters, such as the mirror＇s radius, the angle between mirrors, grazing angle, object distance, etc , were studited, and the spot diagrams and MTF were firstly adopted for evaluating quantitatively image quality of the microscope. The reasonable manufacturing tolerances of components and assembly tolerances of the system were established based on the discussion and analysis above. A set of non-coaxial grazing X-ray microscope has been manufactured under confinement of the tolerances. In site test of ICF,the images with high resolution are obtained by the microscope.