摘要
在单晶硅和玻璃基片上用自组装的方法制备了稀土纳米膜,利用原子力显微镜(AFM)、接触角测量仪等测试手段对制备的薄膜进行了表征;并用自行研制的滑动往复式微摩擦测试系统测试了其摩擦特性.研究结果表明,在玻璃和单晶硅基片表面都成功地组装上了稀土自组装薄膜,未经表面改性的单晶硅和玻璃基片的摩擦系数分别为0.80和0.79,在其表面制备稀土纳米膜后的摩擦系数分别降低至0.16和0.11,同时耐磨性及摩擦稳定性都得到显著提高,显示了稀土纳米膜在微机构表面改性的潜在应用前景.
A self-assembly method was adopted to obtain rare earth (RE) nanofilm on the substrates of single-crystal silicon and glass. A sliding reciprocating micro friction tester was developed to carry out tribological investigation of the films. As a result, the RE nanofilms are of lower steady friction coefficient (COF) and better wearing resistance compared with the substrates, indicating their promising applications in microelectromechanical system(MEMS) field.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
2006年第2期231-233,238,共4页
Journal of Shanghai Jiaotong University
基金
国家自然科学基金资助项目(50475023)
上海市纳米专项基金资助项目(0252nm014)
关键词
稀土
纳米膜
摩擦
微机电系统
rare earth (RE)
nanofilm
friction
microelectromechanical system (MEMS)