稀土纳米膜的制备及摩擦学性能

The Preparation and Friction Behavior of Rare Earth Nanofilm

在单晶硅和玻璃基片上用自组装的方法制备了稀土纳米膜,利用原子力显微镜(AFM)、接触角测量仪等测试手段对制备的薄膜进行了表征;并用自行研制的滑动往复式微摩擦测试系统测试了其摩擦特性.研究结果表明,在玻璃和单晶硅基片表面都成功地组装上了稀土自组装薄膜,未经表面改性的单晶硅和玻璃基片的摩擦系数分别为0.80和0.79,在其表面制备稀土纳米膜后的摩擦系数分别降低至0.16和0.11,同时耐磨性及摩擦稳定性都得到显著提高,显示了稀土纳米膜在微机构表面改性的潜在应用前景.

A self-assembly method was adopted to obtain rare earth （RE） nanofilm on the substrates of single-crystal silicon and glass. A sliding reciprocating micro friction tester was developed to carry out tribological investigation of the films. As a result, the RE nanofilms are of lower steady friction coefficient （COF） and better wearing resistance compared with the substrates, indicating their promising applications in microelectromechanical system（MEMS） field.