利用聚焦离子束蚀刻技术制作长程有序阳极氧化铝纳米孔洞的研究

STUDY ON MAKING LONG RANGE ORDER ANODIC OXIDATION NANOHOLE BY MEANS OF IMAGE IONIC CLUSTER ETCHING TECHNIQUE

利用聚焦离子束在平坦的铝片上制造出整齐的凹洞数组。在之后的阳极氧化过程中,这些凹洞锁定住阳极氧化铝纳米孔洞的位置,因而制造出长程有序的纳米孔洞数组。在纳米孔洞成长的初期,由于由表面结构的变化对纳米孔洞的成长有决定性的影响,所以孔洞的排列完全由凹洞的位置决定。但若经过长时间的阳极氧化,则只有在小心的选择电解液、氧化电压和凹洞数组的周期,因而使纳米孔洞间的应力达到平衡,同时凹洞数组的大小必须大到足以对抗其外围凌乱的纳米孔洞的影响这些条件下,纳米孔洞才能维持其有长程序的结构。

Focused ion beam lithography is employed to patterned aluminum surfaces with lattices of guiding points which pin down the positions of adodic alumina nanochannels during the subsequent anodization process and lead to the formation of long-range-ordered nanochannel arrays. The initial growth rate of nanochannels under the guiding points is enhanced primarily because of the topographic modification by the patterning. As the nanochannels grow longer; the order of such a guided array is usually lost unless the electrolyte, lattice constant of the array, and anodization voltage are carefully matched to balance the strain among the nanochannels, and the size of the array is large enough to withstand the perturbation from the surrounding randomly oriented arrays.