摘要
利用化学气相传输法生长了ZnO单晶.通过控制源区和生长端的温度梯度,使用碳辅助增强质量传输效应,在无籽晶自发成核的条件下,得到了晶粒尺寸达5mm×8mm的ZnO晶体.利用长有GaN层的蓝宝石晶片作为籽晶,得到了直径32mm、厚4mm左右的ZnO单晶体.用光致发光谱和X射线双晶衍射研究了ZnO晶体的性质并对生长的热力学过程和现象进行了分析.
A ZnO single crystal is grown by a chemical vapor transport method. The size of the self-nucleated grown ZnO single crystal is 5mm × 8mm through the control of temperature gradient of source and growth zones and the assistance of mass transport enhancement effect of carbon in the growth process, By using a GaN buffered sapphire substrate,a ZnO single crystal of 32mm diameter,4mm thick is obtained. PL spectroscopy and X-ray diffraction technique are used to characterize the properties and the quality of the ZnO single crystal. Thermodynamic phenomena of the single crystal growth process are also discussed.
关键词
氧化锌
化学气相传输
单晶生长
ZNO
zinc oxide
chemical vapor transport
single crystal growth
