测量压电式微压传感器灵敏度的新方法

Novel method used to measure sensitivity of piezoelectric micropressure sensor

研制了一套压电微压传感器的性能测量系统，它采用均匀声腔硅油介质中传播的声波作为压力源，标准传感器和被测传感器同时接收波动声压，比较两传感器的输出，测定被测传感器的灵敏度及频响。实验测试了3只压电式微压传感器，结果表明：传感器的灵敏度平均为3．0mV／Pa，工作频率为20～2000Hz，灵敏度随频率波动小于0．5mV／Pa，灵敏度重复偏差小于0．24mV／Pa。

A novel system used to measure the sensitivity and operating frequency of piezoelectric mieropressure sensor is developed. The pressure of the acoustic wave propagated in silicon oil is used as input signal in the system. The standard and tested sensors receive the signal at the same time. Comparing the output of the two sensors,the sensitivity and frequency response of tested sensor can be determined. Three sensors are measured in the experiment,the results show that the average sensitivity of micropressure sensor is 3.0 mV/Pa,the operating frequency is 20 - 2000 Hz,the sensitivity fluctuation with frequency is less than 0.5 mV/Pa,the repeated error of the sensitivity is less than 0.24 mV/Pa.