摘要
介绍了基于MEMS技术的磁悬浮转子微陀螺的基本原理,重点对旋转的原理进行讨论,给出相应实现方案的指标分析和系统设计,并进行了实验。经过驱动后,微陀螺可以得到3 000 r/m in的旋转效果,并对旋转的转速和力矩进行了分析。
The basic principle of micromachined gyroscope with magnetic-suspension rotor based on MEMS is introduced, especially the principle of rotation is discussed. The analysis of the index in impementing the corresponding scheme and design of the system is given, as well as the experiment is done. After driving, the micromachined gyroscope can reach 3 000 r/rain. The results of the rotation speed and torque are analyzed.
出处
《传感器与微系统》
CSCD
北大核心
2006年第2期83-85,共3页
Transducer and Microsystem Technologies
基金
国家"863"计划资助项目(2002AA745120)
国家自然科学基金资助项目(60402003)
上海市科委重大专项基金资助项目
关键词
微陀螺
文氏桥
移相
正交驱动
微机电系统
micromachined gyroscope
Wein bridge
phase shift
quadratured drive
MEMS
