微型可编程衍射光栅的特性分析

Analyzing the Characteristics and Better Utilization of Micro Programmable Diffraction Grating

研究了基于微型光机电系统(MOEM S)的微型可编程衍射光栅。利用波动光学理论推导了在编程状态下它的光强分布公式,对可编程光栅每个衍射单元包含的微梁数和其中的微梁高度等参数变化对其衍射特性的影响进行分析,并对其衍射特性进行仿真验证。验证结果表明:光栅衍射单元包含的微梁数会对衍射光的各个主极大空间位置产生影响,而微梁高度的变化则会引起各衍射主极大之间的光强能量重新分布。

To the best of our knowledge, we have not seen in the open literature theoretical analysis in depth of the characteristics of micro programmable diffraction grating, which is based on micro-opticalelectro-mechanical system （MOEMS） technology. We aim to use wave theory of light to do such an analysis with a view to making such grating more useful in applications. In the full paper, we describe our theoretical analysis in much detail; here we give only the main results of our analysis; （1） the characteristics of such a grating are dependent on the number and vertical positions of micro beams; （2） the positions of maximum intensities are determined by the number of micro beams; （3） the maximum intensity distribution is influenced by the vertical positions of micro beams. Our main results of analysis are preliminarily shown to be correct by simulation experiments. The above-mentioned results of analysis allow us to make better use of micro programmable diffraction grating in the two following ways. （1） the simultaneous detections of different frequency range portions of spectrum; （2） weakening useless spectrum signals and strengthening useful ones.