高频窄脉冲电流微细电解加工

ELECTROLYTIC MICROMACHINTNG WITH HIGH FREQUENCY SHORT PULSE CURRENT

微细电解加工是微细加工领域很有发展前景的微细加工技术之一。适合于微细电解加工的装置被研制出来, 它包括机床进给机构、线电极电火花磨削在线制作微细电极装置、短路检测模块、脉冲电源及其他一些辅助装置, 其中,高频窄脉冲电源是微细电解加工最重要的核心技术之一。根据微细电解加工的特点,设计了微细电解加工 MOSFET脉冲电源,该微能脉冲电源能很好地满足微细电解加工的要求。运用该微细电解加工装置进行加工试验, 在低的加工电压和低的钝化电解液浓度条件下,利用高速旋转的微细电极加工微小孔和像小铣刀一样进行微细电解铣削加工微结构,得到了满意的工艺效果,因而进一步说明电解加工在微细加工领域很有发展潜力。

Electrolytic micromachining （EMM） offers many special advantages, and it is a promising technique in micromachining domain. Experimental setup of EMM which is in fact a multifunction machine tool has been developed successfully. Micro tool electrode can also be fabricated by wire electro discharge grinding （WEDG） on the same machine tool. This setup includes feed mechanism, micro electrode fabrication mechanism, high frequency pulsed power supply, short circuit detection and some accessory devices. Pulse power supply is a key technology of EMM. A high frequency pulsed power supply of EMM which suits EMM well has been designed. Sets of the experiments of micro-hole drilling and microstructure milling with micro tool electrode rotating at great high speed by EMM at the multi function micromachining setup have been carried out and the satisfactory process results of micro-hole and microstructure with high precision machined by EMM are obtained on condition that machining voltage and concentration of passivity electrolyte are very low. The experimental results and analysis on EMM will open up more application possibilities for EMM.