双材料微梁阵列非制冷红外成像技术——微梁阵列热变形的光学读出

Bimaterial Micro-Cantilever Uncooled Infrared Imaging System —— Optical Readout Section

针对双材料微梁阵列非制冷红外成像技术的光学读出系统，提出了在谱平面上进行刀口滤波将阵列转角转化为像平面上光强变化的高灵敏度测量技术，并对光学探测灵敏度进行了理论分析。利用该光学读出系统在实验中得到了120℃红外物体的热图像。通过对实验结果的分析和图像处理消除噪声技术，得到该系统在成像温度范围的噪声等效温度差（NETD）约为5K。并对系统噪声进行了讨论。

An optical readout technique used in bimaterial uncooled infrared imaging system, which translates the incline angle of micro cantilever array to the intensity in image plane by knife edge filtering operation in spectrum plane, is presented. The sensitivity of the system is analyzed. A thermal image of about 120℃ object is obtained by the presented system. The image process is used to eliminate the effects of noise. The noise equivalent temperature deference （NETD） in 120℃ is about 5K. The influence and resolution of system noise is discussed.