往复式压电微型泵的研究进展

Development of Reciprocating Piezoelectric Micropumps

介绍往复式压电微泵20多年的发展概况。给出了往复式压电微泵的各种不同结构、主要性能参数、工作原理、材料和加工技术,为压电微泵的设计和加工提供参考,也提出目前存在的问题、研究的方向及应用前景。

The progress over twenty years about the development of reciprocating piezoelectric micmpumps was reviewed. Presented the different structures, main performances, operation principles, materials and fabrication technologies for designing and fabricating in the future and also proposed existing question, studying orientation and outlook of application.