二氧化锡超微粒子气敏薄膜的复数阻抗谱研究

Studies on Complex Impedance Spectroscopy of SnO_2 Ultralfine Particle Films

用直流气体放电活化反应蒸发法制备了二氧化锡超微粒子薄膜，测量了薄膜的阻抗谱，验证了超微粒子薄膜的内部模拟等效电路。研究了温度、还原性气体以及热处理对阻抗谱的影响，并用氧吸附理论和晶界势垒理论定性地解释了这些现象。

The SnO_2 ultralfine particle films(UPF)were prepared by a method called D. C.gas discharge activating reacting deposition. The complex impedance spectroscopy of the films were measured.It is proved that the proposed equivalent circuit of the UPF was feasible,The effects of temperature,reducing gas,water vapour and heat treatment on impedance spectroscopy have been discussed.These phenomena have been explained using the model of oxygen's adsorption and theories of carriers to cross intergrain potential barrier. All of these are helpful to the farther research of gas sensing mechanisms and conduction mechanisms of the UPF.