nm级制造用三维微定位的扫描探针显微镜

A Scanning Probe Microscope with Three Dimensional Micropositioning for Nanofabrication

介绍一种用于ｎｍ级制造具有ｘｙｚ三维微定位能力的扫描探针显微镜（ＳＰＭ）．采用电磁足周期性地夹紧与松开，结合压电陶管的轴向伸缩变形的微位移爬行器构成三维微定位机构．扫描范围可达２０μｍ×２０μｍ，且探针可在样品表面ｘ和ｙ方向上１０ｍｍ×１０ｍｍ范围内实行ｎｍ级的定位．探针在ｚ方向接近样品表面也可自动进行．给出了微定位器的运动分辨率、速度与工作频率。

This paper presents a new scanning probe microscope with a three dimensional ( xyz )micropositioner formed by a microfeed walker using periodic clamping and unclamping of several electromagnetic claws and axial expansion and ocntraction of a PZT tube. The scanning range of the tube is 20 μm×20μm and the positioning of nm level can be carried out by the probe in a region of 10 mm×10 mm in the x and y directions on a sample surface. the approach of the probe to the sample surface in the z direction can also be automatically accomplished. The motion resolution, the velocity and the frequency response of the micropositioner are given. With this system, the atomic image of highly oriented pyrolitic graphite obtained by the scanning tunneling microscopy is also given.