能谱仪半定量分析用的元素Kx·s因子的实验测定和理论校正

EXPERIMENTAL DETERMINATION AND THEORETICAL CORRECTION OF Kx.s FACTORS IN ENERGY DISPERSIVE SpECTROMETRY

本文利用无机盐溶液微滴结晶为标样,在装备有英国Link公司AN10000能谱仪的JEM—1200EX分析电镜上,测定了一组半定量分析用的相对S元素的K_(x·s)因子,并通过计算微滴结晶厚度和吸收校正因子,从理论上进行了校正。同时,对利用K因子测定的已知元素浓度比的实验值与其实际值进行了比较。结果表明,这些K因子的实验值是准确的。

Using crystallized forms of microdroplets of inorganic salt solutions as standards, a set of Kx.s factors of some elements for semiquantitative x-ray micro-analysis were determined on JEM-1200EX analytical electron microscope fitted with AN 10000 energy dispersive spectrometer (EDS, Link Limited), and these factors were theoretically corrected with thickeness of the crystallized forms of microdroplets and the absorption correction factor (CF) was calculated. At hte same time, experimental values of the element ratio determined with Kx.s factors were compared with the known element ratio. These results suggest that these Kx.s factors are accurate and suitable for seniquantitative and quantitative analyses in biology.