摘要
采用金属有机分解法(MOD)在p-S i(111)衬底上制备了钛酸铜钙(CaCu3Ti4O12)薄膜。对前驱体溶液粉体退火后做了红外和X射线分析;对薄膜退火后做了X射线和原子力显微镜分析。结果表明,在空气中750℃退火1h后,钛酸铜钙结晶良好;钛酸铜钙薄膜的生长为二维生长模式。
The CaCu3Ti4O12 thin films were prepared by a metalorganic solution deposition method and deposited on p-Si （ 111 ） substrates by spin coating. Powder of the precursor solutions was studied by infrared scattering spectroscopy and X-ray diffraction, and thin films were studied by X-ray diffraction in the same way. Surface morphology and dimensional measurements after annealing the films were observed and discussed by using atomic force microscopy.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2006年第1期152-154,138,共4页
Journal of Synthetic Crystals
关键词
金属有机分解法
钛酸铜钙
薄膜
metalorganic solution deposition
CaCu3 Ti4 O12
thin films
