基于STM的原子力显微镜的设计及应用

Design and application of an STM-based AFM

原子力显微镜由于不受物质导电性的限制,已经成为纳米检测和加工的重要手段之一。本文介绍了根据隧道效应检测微悬臂位移的原理自制的原子力显微镜系统,重点讲述了镜体结构及特点。测试结果表明该仪器具有原子量级的分辨率。最后还给出了用该原子力显微镜检测到的几幅试样的三维表面形貌图。

Atomic force microscope （AFM）has become an important instrument in nano-detection and nanofabrication. In this paper, the principle of monitoring the displacement of cantilever and main components of an home made model IPC-208B atomic force microscope were introduced, work bench structure and characteristic of this AFM were given. The experiment showed that the instrument achieved atomic scale resolution. In addition, several typical 3-dimension surface images obtained by this AFM were given.